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First, electrostatic adsorption (ESA) electrostatic adsorption can cause serious pollution.
We know that the IC production process requires a clean room or a clean room. However, few domestic manufacturers can do without a particle in a clean room. Now, it is required that the particle size of the dust be reduced from 0.3 μm to 0.1 μm, but if the particle size of the adsorbed dust particles is larger than the line width It is easy to scrap the product.
Sometimes customers will ask, the whole process of manufacturing wafers is very good. The grounding is connected, the anti-static equipment to be used is also used, and the purification level is also very high. Why does it take a while? Will it attract dust afterwards? That is because the FFU high-efficiency filter is installed at the machine or work shop where wafers are processed and processed. When the air flow is rubbed with the product, static electricity is generated. When the static electricity accumulates to a certain amount, dust is adsorbed. Therefore, we recommend installing a static eliminator without a gas source under the high-efficiency filter to ensure the dynamic balance of the entire space.
Second, ESD (Electrostatic Discharge) electrostatic discharge, it will cause device breakdown.
Electrostatic discharge is the process of charge accumulation. When the charge is accumulated to a certain extent, a conductor close to it will generate electrostatic discharge. To give a very simple example, in the dry winter, people walk around and rub on, it is easy to accumulate static electricity. When we touch the metal handle or open the car door, there will be a feeling of electric shock. This is the electrostatic discharge. Generally, the human body has 3000 - When the static electricity is 5000V, there will be a noticeable discharge.
The same is true for semiconductor devices. If a semiconductor device with a certain amount of static electricity is placed or loaded into a circuit module alone, it will be broken down immediately. After the device is affected by electrostatic discharge, there may not be immediate functional damage, but it will affect the reliability of the components.
The losses caused by electrostatic discharge can reach several billion US dollars per year. Therefore, many large-scale components and equipment manufacturers have introduced specialized technologies to reduce static electricity accumulation in the production environment.
Third, EMI (Electro Magnetic Interference) electronic interference, it will cause damage.
Electrostatic discharge will radiate a lot of radio waves, and these waves are all frequency. It will cause great interference to the surrounding microprocessors. For example, chaotic program instructions, confusing data, unknown error messages, etc. will occur. These problems are generally not valued, but the harm it will bring will be enormous once it fails.
The damage caused by the above hazards is staggering. According to relevant reports, China’s electronics industry has estimated that direct economic losses caused by static electricity are as high as billions of renminbi each year; the direct economic losses of the electronic industry caused by static electricity in the United States exceed 100 billion U.S. dollars per year; the United Kingdom has also suffered nearly 2 billion pounds in losses; In Japan in the 1990s, 45% of substandard microelectronic devices were caused by static electricity. These figures are very shocking. Adding up to these global losses should allow the construction of dozens of large chip manufacturers. The harm caused by static electricity is so great. Of course, you need the most professional electrostatic treatment experts to help you fully solve the electrostatic problem.
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